Scope
The conference
provides an
opportunity for the presentation of recent advances in modeling and
simulation of semiconductor devices, processes and equipment for
manufacturing.
Topics may
include
-
Device simulation
including quantum effects and nanodevices in silicon and compound
semiconductors
-
Process modeling and
simulation including both continuum and atomistic approaches
-
Equipment,
topography and
lithography simulation
-
Circuit modeling
including
interconnects
-
Integration of
process,
device and circuit simulation
-
High performance
computing
and advanced numerical methods
-
Compact modeling and
integration of device/circuit simulation
-
Simulation of
mechatronical micro- and nanodevices
-
Calibration of
models and
verification and benchmarking of simulators
Abstracts
Authors should submit 30 copies of a two-page abstract including
figures. The abstract should include: title, 1st author´s name
and
complete mailing address, names of additional authors and e-mail
addresses. Authors will be notified by April 30, 2004. A camera-ready
copy of a four-page extended abstract will be required from the authors
of the accepted papers by June 1, 2004 for inclusion in the 2004 SISPAD
Proceedings.
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Extended Deadline for
Submission of Abstracts: March 6, 2004
The abstract should be sent to the Conference Secretariat:
SISPAD 2004
Dr. Gabriele Schrag
Institute for Physics of Electrotechnology
Munich University of Technology
Arcisstrasse 21, 80290 Munich, Germany
e-mail: sispad04@tep.ei.tum.de
Tel.: +49-89-289 23125, Fax: +49-89-289 23164
Selection Criteria
The degree to which the two-page abstract deals with the following
criteria will strongly affect whether the paper is selected:
- What is the motivation for your
paper?
- What is new or original and how does it differ from
previous work?
- What is its impact or significance?
- What are the major and specific results?
Organization
Gerhard Wachutka, Conference Chair
Gabriele Schrag, Program Organization
Munich University of Technology, Germany
Conference Venue
The conference will
be held
at the Holiday Inn Munich - City Centre (former FORUM Hotel), located
close to the historic centre of Munich. In
addition to the conference technical program, several social activities
are being planned to allow attendees ample opportunity to enjoy their
staying.
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