Scope and Topics


 The Conference provides an opportunity for the presentation of latest advances in modeling and simulation of semiconductor devices, processes and circuits. Special emphasis is placed on practical applications.


- Back-end modeling and simulation including equipment optimization

- Process modeling and simulation based on macroscopic as well as atomistic approaches

- Optimization methods for process variation

- All sorts of advanced device simulations including comparison with real world

- Compact modeling for advanced devices and parameter extraction methods

- Interconnect modeling including high frequency applications

- Reliability modeling for fabrication processes

- Advanced numerical methods and algorithms

- Methods for characterizing properties of advanced materials